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User name pzhu
Log entry time 22:04:43 on April14,2012
Entry number 374604
keyword=position moved backafter target anneal, we moved the position 1mm left and 0.5mm down (to the center position), the spot_3 is pretty clean in carbon target. the slow raster size is 1.05V(1.86cm) and fast raster is 2x2.
the position now is:
(1.09739 -1.19814) (-0.168194 -2.96665)
FIGURE 1
