| Target | max beam current | minimal raster size | |
| 25-cm LD2 | 85 uA | 2mm by 2mm | |
| 20-cm LD2 | 85 uA | 2mm by 2mm | |
| 20-cm LD2-II | 85 uA | 2mm by 2mm | |
| 25 cm dummy | 50 uA | 2.5mm by 2.5mm | |
| 25 cm holey dummy | 50 uA | 2.5mm by 2.5mm | |
| 30cm carbon optics | 120 uA | none | |
| BeO | 100 uA | none | |
| Empty | 120 uA | none | |