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User name C. C. Chang
Log entry time 20:39:21 on January21,2003
Entry number 92862
keyword=Beam spot size/halo
After spending more than one hour trying to reduce the beam spot size (was more then 250 um by 250 um diameter) and improving beam halo, MCC failed to improve neither. An optic expert will be called to take a look. While waiting for the expert, we decide to take another run with empty ref. cell and with raster on just to see whether there might be any improvement.