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    User name nmuangma

    Log entry time 21:53:03 on June15,2010

    Entry number 326816

    keyword=target vacuum/ beam current

    at 21:17 the target vacuum fluctuate at higher pressure. Vincent decides to lower the beam and let the vacuum stable for awhile then we are now 21:42 back to the 50 micro-A.

    the vacuum yet stable for about 20 mins.

    FIGURE 1