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User name lkaufman
Log entry time 03:47:38 on May 6,2003
Entry number 100326
keyword=Beam profile
Rob Feuerbach called and asked us to look at the beam profile while the raster is off. We had empty target in, and raster off, 6 um. The x width is ~300um, and the y-width is ~ 450 um. Even though this is worse than usual, it is the same as what was seen this afternoon, so we won't ask for a change at this time.
FIGURE 1