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    User name lkaufman

    Log entry time 03:47:38 on May 6,2003

    Entry number 100326

    keyword=Beam profile

    Rob Feuerbach called and asked us to look at the beam profile while the raster is off. We had empty target in, and raster off, 6 um. The x width is ~300um, and the y-width is ~ 450 um. Even though this is worse than usual, it is the same as what was seen this afternoon, so we won't ask for a change at this time.


    FIGURE 1