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    User name paschke

    Log entry time 09:24:29 on August13,2003

    Entry number 110513

    keyword=spot size spec clarification



    There is some confusion about the spec for the beam spot size and
    aspect. We desire an unrastered beam spot of >100 um and <200 um
    in both horizontal and vertical widths measured at scanner #6 (1H03B).
    The only spec on scanner #5 is that the convergence/divergence does
    not strongly effect the beam spot. #5 is 7 meters upstream of #6,
    which is 1 m upstream of the target, so this allows a large tolerance
    at #5.