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User name R. Michaels
Log entry time 02:15:13 on August24,2003
Entry number 113042
keyword=spot size check
Beam returns.
Measure the spot size, both the intrsinsic and rastered size.
Target at empty target position. First, turn off raster.
Look at Target OTR @ 1H04A. Widths: 150(X) 200(Y) microns RMS.
Now turn raster back on. Measure with spot+ 3.5 mm square.
These are ok !!