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User name Jin
Log entry time 23:59:16 on January 9,2009
Entry number 255274
Followups:
keyword=Pumping chamber RTD7 is broken
Pumping chamber RTD7 (HacAi_hpchan6) has gone crazy. Which has a high chance that give a 320C reading. Probably it's cable goes loose contact during today's target work.
FIGURE 1
FIGURE 2