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    User name Yoomin

    Log entry time 03:56:55 on February 08, 2009

    Entry number 259718

    keyword=Raster Size Test for production

    With 2uA beam, spot size between two peaks.

    Started production with raster 4.5x5.0 in MCC unit(3x2.2 by spot++)

    Run MCC spot++ T1 T2 T3 T4 T6 comment
    20108 3.5x3.5 2.2x1.6 4.3k 89 84 10 450
    20109 3.5x4.5 2.2x2.0 4.3k 98 78 11 490 spot not change?
    20110 5.0x5.0 3.0x2.2 4.3k 90 88 14 470
    20111 6.0x6.0 4.0x2.4 4.3k 92 85 11 472
    ----- 6.6x6.6 --- didn't change much