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User name N Toro
Log entry time 23:04:23 on July 5,2010
Entry number 330345
keyword=decreased beam current to 1uA, raster to 6x6 MCC
decreased beam current to 1uA, raster to 6x6 MCC.
There is still non-uniformity, but we're not sure whether it's frame or just variation in thickness of Ta target.